The ion implanter is a core piece of equipment in semiconductor manufacturing and plays a crucial role in determining chips’ performance.
Definition of Ion Implantation
An ion implanter alters the electrical properties of specific areas within semiconductor wafers by injecting particular ions (such as boron, phosphorus, arsenic, etc.), thereby forming critical structures like P-N junctions and source-drain regions in devices. It is one of the most essential pieces of doping equipment in the manufacturing of semiconductor integrated circuits.
Classifications of Ion Implantation Equipment
By Ion Energy
Low-energy ion implanter(below 100 keV)
Medium-energy ion implanter(100-300 keV)
High-energy ion implanter(300-1000 keV)
MeV ion implanter for even higher energies.
Components of Ion Implanters
A complete ion implanter mainly consists of three major components: the ray system (core), auxiliary support system, and mechanical transmission system.
| Ray System (Core Beam Path): The ray system is the most critical part of the ion implanter, responsible for generating, selecting, accelerating, focusing, scanning, and injecting ions.
| Auxiliary Support System: This system provides environmental assurance and energy support for the stable operation of the ray system.
| Mechanical Transmission System: This primarily includes the automatic wafer transport system (such as robotic arms, cassettes, and vacuum locks) and the end station, responsible for the automatic loading, unloading, transfer, and precise alignment of wafers, enabling the automation and mass operation of the equipment.
The Role of Magnets in Ion Implantation
Magnets in an ion implanter are primarily used for the selection, separation, deflection, and focusing of the ion beam to ensure that the ions injected into the wafer have extremely high purity and precise pathways. Magnets are indispensable precision components in the beam line system of the ion implanter, directly determining the purity of the ion beam, the accuracy of energy control, and the uniformity of injection, playing a decisive role in the yield of semiconductor doping processes.
Magnet Manufacturer
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Image Source: Matsusada & Ulvac & Nissin & Samaterials & Semicorex & Wikipedia
